Micro Electro-Mechanical Room Temperature Hydrogen Sensor

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Top view of the mask design of the hydrogen micro sensor, and the exploded view of the same showing the resistive temperature sensor of the hydrogen micro sensor
Hyoung Cho, Ph.D.
Sudipta Seal, Ph.D.
Satyajit Shukla
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Andrea Adkins
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Room temperature hydrogen sensor

US Patent 7,791,150 B1

A micro electro-mechanical system (MEMS) device that incorporates its own UV radiation source and thin film technology to detect hydrogen at low concentrations and at room temperature

Hydrogen gas is currently used for a variety of industrial, commercial and scientific purposes. While extremely useful, it is also highly combustible, even at concentrations as low as 4% by volume. The creation of keen and reliable hydrogen sensors is critical. Current detection methods and devices are highly susceptible to false alarms, require an oxidative reaction for the detection of hydrogen loads, require high operating temperatures (posing a risk of explosion) and are easily contaminated by halogenated hydrocarbons, silicones, lead and phosphorous.

Technical Details

Seeing the obvious deficiencies in the previous devices, University of Central Florida scientists have created a solid-state room temperature hydrogen-specific sensor. Its design was specifically engineered to be lightweight, compact and inexpensive.


  • Hydrogen-specific (responds only to hydrogen and is not susceptible to poisoning)
  • Lightweight and compact
  • Inexpensive to manufacture
  • Has no moving parts, fast response times, robust detection at minimal power consumption, and is already integrated into a portable prototype


  • Semiconductor and metal ore manufacturers
  • Oil refineries
  • Aerospace
  • Chemical
  • Hydrogen gas production and storage